Microelectronic Test Structures for CMOS Technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Bhushan, Manjul (Autor), Ketchen, Mark B. (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer New York : Imprint: Springer, 2011.
Edición:1st ed. 2011.
Temas:
Electronics.
Optical materials.
Electronic circuits.
Electronics and Microelectronics, Instrumentation.
Optical Materials.
Electronic Circuits and Systems.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Introduction
  • Test Structure Basics
  • Resistors
  • Capacitors
  • MOSFETs
  • Ring Oscillators
  • High Speed Characterization
  • Test Structures of SOI Technology
  • Test Equipment and Measurements
  • Data Analysis.

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