Silicon Carbide Microsystems for Harsh Environments

<p><em>Silicon Carbide Microsystems for Harsh Environments</em> reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments. Technological readiness of the system components, key issues when integra...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Wijesundara, Muthu (Autor), Azevedo, Robert (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer New York : Imprint: Springer, 2011.
Edición:1st ed. 2011.
Colección:MEMS Reference Shelf, 22
Temas:
Electronics.
Electronic circuits.
Microtechnology.
Microelectromechanical systems.
Electronics and Microelectronics, Instrumentation.
Electronic Circuits and Systems.
Microsystems and MEMS.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Introduction to Harsh MEMs
  • Silicon Carbide Processing
  • Silicon Carbide Electronics
  • Silicon Carbide MEMS Devices
  • Silicon Carbide MEMs Device Packaging
  • System Integration.

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