Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines /
Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark At...
Clasificación: | Libro Electrónico |
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Autor Corporativo: | |
Otros Autores: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
New York, NY :
Springer US : Imprint: Springer,
2010.
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Edición: | 1st ed. 2010. |
Colección: | MEMS Reference Shelf,
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Temas: | |
Acceso en línea: | Texto Completo |
Tabla de Contenidos:
- to PowerMEMS
- System Design Considerations and Device Overview
- Materials, Structures and Packaging
- Microengine Fabrication
- Fabrication of Microscale Rotating Magnetic Machines
- High-Speed Gas Bearings for Micro-Turbomachinery
- Thermofluidics and Turbomachinery
- Motors and Generators
- Microcombustors for Rotating Machinery.