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Nanofabrication Principles, Capabilities and Limits /

Nanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics invol...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Cui, Zheng (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer US : Imprint: Springer, 2008.
Edición:1st ed. 2008.
Temas:
Acceso en línea:Texto Completo

MARC

LEADER 00000nam a22000005i 4500
001 978-0-387-75577-9
003 DE-He213
005 20220126133043.0
007 cr nn 008mamaa
008 100301s2008 xxu| s |||| 0|eng d
020 |a 9780387755779  |9 978-0-387-75577-9 
024 7 |a 10.1007/978-0-387-75577-9  |2 doi 
050 4 |a T174.7 
050 4 |a TA418.9.N35 
072 7 |a TBN  |2 bicssc 
072 7 |a TEC027000  |2 bisacsh 
072 7 |a TBN  |2 thema 
082 0 4 |a 620.5  |2 23 
100 1 |a Cui, Zheng.  |e author.  |4 aut  |4 http://id.loc.gov/vocabulary/relators/aut 
245 1 0 |a Nanofabrication  |h [electronic resource] :  |b Principles, Capabilities and Limits /  |c by Zheng Cui. 
250 |a 1st ed. 2008. 
264 1 |a New York, NY :  |b Springer US :  |b Imprint: Springer,  |c 2008. 
300 |a XIV, 343 p. 177 illus.  |b online resource. 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
347 |a text file  |b PDF  |2 rda 
505 0 |a Nanofabrication by Photons -- Nanofabrication by Charged Beams -- Nanofabrication by Scanning Probes -- Nanofabrication by Replication -- Nanoscale Pattern Transfer -- Indirect Nanofabrication -- Nanofabrication by Self-Assembly. 
520 |a Nanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The capabilities of each technology in making sub-100nm structures are described. The limits of preventing a technology from further going down the dimensional scale are analyzed. Drawing upon years of practical experience and using numerous examples, Zheng Cui covers state-of-the art technologies in nanofabrication including: Photon-based lithography Charged particle beams lithography Nanofabrication using scanning probes Nanoscale replication Nanoscale pattern transfer Indirect nanofabrication Nanofabrication by self-assembly Nanofabrication: Principles, Capabilities and Limits will serve as a practical guide and first-hand reference for researchers and practitioners working in nanostructure fabrication and also provides a "tool box" of various techniques that can be easily adapted in different fields of applications. Written for: Nanoscience and nanotechnology researchers and engineers, technical professionals and academic researchers in the fields of electrtonics, mechanical engineering, and chemical engineering. 
650 0 |a Nanotechnology. 
650 0 |a Materials science. 
650 0 |a Mechanics, Applied. 
650 0 |a Solids. 
650 0 |a Optical materials. 
650 1 4 |a Nanotechnology. 
650 2 4 |a Materials Science. 
650 2 4 |a Solid Mechanics. 
650 2 4 |a Optical Materials. 
710 2 |a SpringerLink (Online service) 
773 0 |t Springer Nature eBook 
776 0 8 |i Printed edition:  |z 9780387567297 
776 0 8 |i Printed edition:  |z 9781441945365 
776 0 8 |i Printed edition:  |z 9780387755762 
856 4 0 |u https://doi.uam.elogim.com/10.1007/978-0-387-75577-9  |z Texto Completo 
912 |a ZDB-2-CMS 
912 |a ZDB-2-SXC 
950 |a Chemistry and Materials Science (SpringerNature-11644) 
950 |a Chemistry and Material Science (R0) (SpringerNature-43709)