Mems/Nems (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS /

Micro-Electro Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical c...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: SpringerLink (Online service)
Otros Autores: Leondes, Cornelius T. (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer US : Imprint: Springer, 2006.
Edición:1st ed. 2006.
Temas:
Nanotechnology.
Electronics.
Mechanical engineering.
Engineering design.
Optical materials.
Electronics and Microelectronics, Instrumentation.
Mechanical Engineering.
Engineering Design.
Optical Materials.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices
  • Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS
  • Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS)
  • Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications
  • Techniques in Global Optimal Design for MEMS & Their Applications
  • Theory and Design of Micromechanical Vibratory Gyroscopes
  • A Hierarchical Design Platform for Microelectrofluidic Systems (MEFS)
  • Techniques in Electrostatics Analysis of MEMS and Their Applications
  • Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems
  • Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications
  • Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications
  • GaAs Thermally Based MEMS Devices-Fabrication Techniques, Characterization and Modeling
  • Novel MEMS Fluidic Integrated Circuit Technology with 'MOSFET-Like Microvalve Elements'
  • Hydrogel-based ?TAS
  • Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication
  • MEMS/NEMS Techniques and Applications
  • Techniques in the Development of Micromachine Tool Prototypes & Their Applications in Microfactories MET Technology
  • Tool-based Micro Machining and Applications in MEMS
  • Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application
  • Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices
  • Injection Molding Techniques for the Fabrication of MEMS Elements
  • Excimer Laser Micromachined Three-dimensional Microstructures-Techniques and Applications
  • Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems
  • Production Scheduling in MEMS Manufacturing
  • MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives
  • Micromachined Thermal Accelerometer without Proof Mass
  • Techniques in MEMS Devices for Micro Humidity Sensors and Their Applications
  • Modeling the Electromechanical Response of Electrostatic Actuators
  • Micropumps for MEMS/NEMS and Microfluidic Systems
  • FEM (Finite Element Modeling) Techniques for Electrostatic Microactuators
  • Techniques in the Design of Thermomechanical Microactuators
  • Techniques in MEMS Microthermal Actuators and Their Applications
  • Techniques in Residual Stress Measurement for MEMS and Their Applications
  • Techniques in Sonophoresis Biomedical Devices and Their Applications
  • MEMS Application of Actuators and Sensors for Glaucoma Treatment
  • Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications
  • Techniques in the Development of Endovascular Microtools & Their Applications
  • Techniques in the Design and Fabrication of Optical MEMS Switches and their Application in Optical Communication Systems
  • Micromachining Techniques and MEMS Structures in Optical Interferometric Sensors
  • Magnetic Microactuators-Techniques and Applications
  • Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications
  • Vertical Combdrive Actuator: Design and Fabrication for Micromirror Applications
  • Three-Dimensional Techniques for FEM Simulations in Laser Modules and Their Applications.

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