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Electroceramic-Based MEMS Fabrication-Technology and Applications /
The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging a...
| Clasificación: | Libro Electrónico |
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| Autor Corporativo: | |
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
New York, NY :
Springer US : Imprint: Springer,
2005.
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| Edición: | 1st ed. 2005. |
| Colección: | Electronic Materials: Science & Technology ;
9 |
| Temas: | |
| Acceso en línea: | Texto Completo |