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Mechanics of Microelectromechanical Systems
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical mo...
| Clasificación: | Libro Electrónico |
|---|---|
| Autores principales: | , |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
New York, NY :
Springer US : Imprint: Springer,
2005.
|
| Edición: | 1st ed. 2005. |
| Temas: | |
| Acceso en línea: | Texto Completo |
Tabla de Contenidos:
- Stiffness Basics
- Microcantilevers, Microhinges, Microbridges
- Microsuspensions
- Microtransduction: Actuation and Sensing
- Static Response of Mems
- Microfabrication, Materials, Precision and Scaling.