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Mechanics of Microelectromechanical Systems

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical mo...

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Detalles Bibliográficos
Clasificación:	Libro Electrónico
Autores principales:	Lobontiu, Nicolae (Autor), Garcia, Ephrahim (Autor)
Autor Corporativo:	SpringerLink (Online service)
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	New York, NY : Springer US : Imprint: Springer, 2005.
Edición:	1st ed. 2005.
Temas:	Mechanical engineering. Mechanical Engineering.
Acceso en línea:	Texto Completo

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