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MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness /

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Acar, Cenk (Autor), Shkel, Andrei (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer US : Imprint: Springer, 2009.
Edición:1st ed. 2009.
Colección:MEMS Reference Shelf,
Temas:
Acceso en línea:Texto Completo

MARC

LEADER 00000nam a22000005i 4500
001 978-0-387-09536-3
003 DE-He213
005 20220113071418.0
007 cr nn 008mamaa
008 110401s2009 xxu| s |||| 0|eng d
020 |a 9780387095363  |9 978-0-387-09536-3 
024 7 |a 10.1007/978-0-387-09536-3  |2 doi 
050 4 |a TK7800-8360 
072 7 |a TJF  |2 bicssc 
072 7 |a TEC008000  |2 bisacsh 
072 7 |a TJF  |2 thema 
082 0 4 |a 621.381  |2 23 
100 1 |a Acar, Cenk.  |e author.  |4 aut  |4 http://id.loc.gov/vocabulary/relators/aut 
245 1 0 |a MEMS Vibratory Gyroscopes  |h [electronic resource] :  |b Structural Approaches to Improve Robustness /  |c by Cenk Acar, Andrei Shkel. 
250 |a 1st ed. 2009. 
264 1 |a New York, NY :  |b Springer US :  |b Imprint: Springer,  |c 2009. 
300 |a XII, 260 p. 131 illus.  |b online resource. 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
347 |a text file  |b PDF  |2 rda 
490 1 |a MEMS Reference Shelf,  |x 1936-4415 
505 0 |a Fundamentals of Micromachined Vibratory Gyroscopes -- Fundamentals of Micromachined Gyroscopes -- Fabrication Technologies -- Mechanical Design of MEMS Gyroscopes -- Electrical Design of MEMS Gyroscopes -- Structural Approaches to Improve Robustness -- Linear Multi DOF Architecture -- Torsional Multi DOF Architecture -- Distributed Mass Architecture -- Conclusions and Future Trends. 
520 |a  MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In part two, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material. MEMS Vibratory Gyroscopes is a must have book for engineers in both industry and academia who specialize in the design and manufacture of gyroscopes. Readers will find: A unique balance between theory and practical design issues. Comprehensive and detailed information outlining the mathematical models of the mechanical structure and system-level sensor design. Solid background Information on mechanical and electrical design, fabrication, packaging, testing and characterization. About The MEMs Reference Shelf: "The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIA Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus. 
650 0 |a Electronics. 
650 0 |a Electronic circuits. 
650 0 |a Automotive engineering. 
650 0 |a Mechanical engineering. 
650 1 4 |a Electronics and Microelectronics, Instrumentation. 
650 2 4 |a Electronic Circuits and Systems. 
650 2 4 |a Automotive Engineering. 
650 2 4 |a Mechanical Engineering. 
700 1 |a Shkel, Andrei.  |e author.  |4 aut  |4 http://id.loc.gov/vocabulary/relators/aut 
710 2 |a SpringerLink (Online service) 
773 0 |t Springer Nature eBook 
776 0 8 |i Printed edition:  |z 9781441934895 
776 0 8 |i Printed edition:  |z 9780387560700 
776 0 8 |i Printed edition:  |z 9780387095356 
830 0 |a MEMS Reference Shelf,  |x 1936-4415 
856 4 0 |u https://doi.uam.elogim.com/10.1007/978-0-387-09536-3  |z Texto Completo 
912 |a ZDB-2-ENG 
912 |a ZDB-2-SXE 
950 |a Engineering (SpringerNature-11647) 
950 |a Engineering (R0) (SpringerNature-43712)