Introductory MEMS Fabrication and Applications /

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on ME...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Adams, Thomas M. (Autor), Layton, Richard A. (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer US : Imprint: Springer, 2010.
Edición:1st ed. 2010.
Temas:
Electronics.
Electronic circuits.
Mechanics.
Surfaces (Technology).
Thin films.
Mechanics, Applied.
Solids.
Electronics and Microelectronics, Instrumentation.
Electronic Circuits and Systems.
Classical Mechanics.
Surfaces, Interfaces and Thin Film.
Solid Mechanics.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Fabrication
  • The substrate and adding material to it
  • Creating and transferring patterns#x2014;Photolithography
  • Creating structures#x2014;Micromachining
  • Solid mechanics
  • Applications
  • Thinking about modeling
  • MEMS transducers#x2014;An overview of how they work
  • Piezoresistive transducers
  • Capacitive transducers
  • Piezoelectric transducers
  • Thermal transducers
  • to microfluidics
  • Laboratories
  • Microfabrication laboratories.

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