Filters and filtration Micro-Electrical-Mechanical Systems Microelectromechanical systems Microsystèmes électromécaniques bulk acoustic wave devices finite element analysis integrated circuit design integrated circuit manufacture integrated circuit modelling integrated circuit packaging integrated circuit reliability integrated circuit testing microfabrication micromechanical resonators radiofrequency filters radiofrequency integrated circuits radiofrequency oscillators surface acoustic wave resonator filters surface acoustic wave resonators three-dimensional integrated circuits